系内部の真空度及び気体の圧力測定にはピラニー真空計(ULVAC)および

系内部の真空度及び気体の圧力測定にはピラニー真空計(ULVAC)およびバラトロン真空計（MKS）を用いた。

ผลลัพธ์ (อังกฤษ) 1:

System internal vacuum and gas pressure measurement with Pirani vacuum gauge (ULVAC) and baratron gauges （ MKS ）.

ผลลัพธ์ (อังกฤษ) 2:

The pressure measurement of the system internal degree of vacuum and gas I was using Pirani vacuum gauge (ULVAC) and Baratron vacuum meter (MKS).

ผลลัพธ์ (อังกฤษ) 3:

With diode-thermistors vacuum gauge in the measurement of gas pressure and the vacuum degree of the system vacuum gauge. ULVAC inside Tron rose and MKS) was used.