Scanning electron microscope (SEM) is one that utilizes secondary electrons of which, on the sample surface small focused electron beam (electron beam) is irradiated while scanning, the secondary electrons emitted from the irradiation point was imagery, it is possible to observe a structure mainly derived from the unevenness of the sample surface. Since the wavelength of the electron beam of one hundred thousandth degree of light, it is possible to try to resolve far more finer than the optical microscope.
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